Nano-device Fabrication

       There is considerable activity currently in fabricating devices/structures with critical dimensions in the sub 100 nm regime. The idea is to characterize these devices for interesting physics. Novel fabrication methods are being used to get to the sub 50 nm critical dimensions, and new process flows are being developed for complete device fabrication. Much of the work to be carried out at this centre is going to revolve around patterning features with dimensions in the sub 50 nm regime. The structures we wish to fabricate are typically new device structures, electrodes for molecular electronics, for DNA synthesis, sensors etc. Molecular materials like conjugated polymers will also be used for fabricating nanometer sized devices. Biomolecules such as proteins and nucleic acids will be immobilized in the polymer. We will attempt to understand the electrical and sensor characteristics of these devices. The influence of going from micrometer to nanometer dimension on these properties will be studied. We will also integrate these non-conventional structures with silicon devices and study the characteristics of these integrated circuits.