For MEMS/NEMS based sensor development mechanical vibrations play an important role. To carry out good design and development it is important to characterize vibrations of MEMS device and get mode shapes, resonance frequencies, and damping in the device. Some examples of such sensors are vibrating biosensors, accelerometers, gyroscopes, mechanical resonators and filters. Hence scanning laser doppler vibrometer will be setup in this Nanotechnology centre. Its important specifications will be :
                   * High scanning speeds using piezo scanners
                   * Vibration frequencies upto 20 MHz out of plane and 1MHz in plane
                   * Pecometer resolution for out of plane motions
                   * Higher ranges of motion could be measured e.g. 40 micrometer vibration amplitude with around 1nm accuracy.